The Environmental Protection Agency (EPA) faces a lawsuit from the nonprofit Earthjustice over its approval of two photoacid generators — chemicals critical to semiconductor manufacturing. According to the complaint, the EPA authorized the import and use of these substances with minimal restrictions, despite evidence they pose an 'unreasonable risk' to workers and the public.
Earthjustice attorney Jonathan Kalmuss-Katz, who is leading the case, stated that the EPA 'does not know the level at which the chemicals are acutely lethal or cause other serious health damage.' The lawsuit argues that under the Toxic Substances Control Act (TSCA), if a chemical may present an unreasonable risk, the EPA must prohibit or limit its use — not grant approval with weak safeguards.
The approvals come amid a broader push by the Trump administration to bolster U.S. semiconductor manufacturing. In 2025, President Trump issued an executive order to fast-track chemicals needed for data centers and chip fabrication. It is unclear whether these two photoacid generators were subject to that order, but the lawsuit contends the EPA's actions fit 'a broader pattern around data centers' to expedite approvals regardless of health risks.
Photoacid generators are used in photolithography, a process that patterns circuits onto silicon wafers. As demand for AI and data center infrastructure surges, so does demand for the chemicals that enable chip production. However, Earthjustice alleges the EPA did not conduct adequate testing and that exposure to the chemicals could lead to 'sudden death,' along with cancer, eye corrosion, and reproductive harm. The chemicals also appear to be PFAS, a class of compounds known for their persistence in the environment and links to health problems.
The EPA has not publicly responded to the specific allegations. Supporters of the administration's approach argue that reducing reliance on foreign chip supply — particularly from Taiwan and China — is a national security priority and that overly burdensome regulation could stifle domestic manufacturing. Industry groups have noted that semiconductor supply chains depend on specialized chemicals, and delays in approval could hamper production goals.
Despite these arguments, critics warn that fast-tracking toxic substances without proper safety data puts factory workers and nearby communities at risk. 'This is turning the new chemical review process on its head,' Kalmuss-Katz said. 'The EPA has failed at its most fundamental obligation: to protect the public from unreasonable risk.' The outcome of the lawsuit could set a precedent for how the agency balances economic competitiveness with environmental and occupational safety.